Wherever precision devices need to rotate or move in semiconductor manufacture and test, there is a specially designed and engineered thin-section bearing solution from UNASIS. The UNASIS portfolio for this industry offers customers with the option for either ex-stock or fully customisable thin-section bearings that are designed to exclusively maximise performance whilst simultaneously minimising contamination, outgassing, friction, wear, and corrosion. UNASIS experts are heavily experienced in the design needs for semiconductor manufacturing machinery and can consult or advise customers on optimal material and lubricants for operations in high vacuum (10-8 to 10-12 Torr) and localised temperatures above 250°C. Our experienced engineers and technicians can also advise on minimising particulate generation and on tolerances for thin-section bearings to be utilised in corrosive chemical environments.
When weight reduction, high speed, and saving space is important, thin-section bearings can be the ideal solution. When it is required, bearings can feature a common race with two bearing paths that are ground at the same tome and ‘run-out’ together, this particular design aids to smooth out any potential additional torque that could be caused by variations in axial runout, UNASIS experts can advise on this. Other thin-section bearings from our range offer single outer and single inner raceways. The reason for this is to provide optimised torque performance if a misalignment occurs during installation when thin-section, angular, contact bearings are either stacked or paired.
One of the key design advantages from UNASIS thin-section bearings for semiconductor applications is that our seals (shielding) can be specified for the bearing without adding to the space required. UNASIS specialist semiconductor engineers can advise and consult regarding seals that can be used in atmospheric environments, or shields that should be considered for clean-room environments. Designers should note that because there is zero contact between the inner race and the shields, there is no torque penalty, patience generation, heat build-up, or degradation of performance when thin-sections bearings are used.
UNASIS is located near Oxford, meaning that our experienced semiconductor machine design precision bearing team are in the midst of a high-technology cluster, including motorsport, medical, nuclear, and aerospace. UNASIS’ expert staff are all highly-trained engineers that provide customers with a unique and innovative experience. We also offer our customers access to UNASIS’ R&D department, providing what we believe to be the most advanced bearing simulation software in the UK to assist in the selection and/or design of suitable bearings for high-tech and demanding semiconductor manufacturing machinery and applications.